Vacuum pump EDWARDS STP Pump with Integrated Controller
The STP-iXA2206 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STP-iXA2205 series. The height of the pump is equal to the STP-A2203C and is also equal to the height of the STP-iXA2205 series without it’s power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.
The STP-iXA3306 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STPiXA3305 series.
The height of the pump is equal to the STP-XA2703/XA3203 and is also equal to the height of the STP-iXA3305 series without its power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.
Edwards STP-iXA4506 series magnetically levitated turbomolecular pump (TMP) uses state-of-the-art technology to provide industry-leading performance, improved gas flow capability and high temperature management for today’s challenging applications.
Applications
- Plasma etch (chlorine, fluorine and bromine chemestries) for metal (aluminium), tungsten and dialectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping and station
Features and Benefits STP-iXA2206C& STP-iXA3306C
- Compact design including a fully integrated controller
- Innovative, self-sensing magnetic bearing system
- Digital 5-axis control
- Vibration levels reduced by 50% compared to the existing turbo pumps
- Can be configured to run corrosive processes
Features and Benefits STP-iXA4506
- The fully integrated controller and power supply eliminates the need for cables and a separate controller rack, resulting in a cost effective, compact TMP package that is fast and easy to install in a small footprint.
- Maximum continuous flow capability of 4300 sccm (N2), achieving a performance increase of more than 50%, when compared to STP-XA4503.
- The pump will operate efficiently with cooling water supply up to 35 °C.
- Temperature Management System (TMS) unit is available for processes generating by-products.
- I/O Remote, RS232C, RS485, STP-Link are standard ports.
- UL marked, CE marked, SEMI-S2 and RoHS compliant.
SPECIFICATIONS
| Model. | STP-iXA2206C |
| Inlet flange size | ISO250F/VG250/ICF305 |
| Backing port size | KF40 |
| Pump speed N₂/Ar | 2200/1900 ls⁻¹ |
| Compression ratio N₂/H₂ | >10⁸ / 1 x 10⁴ |
| Ultimate pressure | 10⁻⁷ Pa (10⁻⁹ Torr) |
| Allowable backing pressure | 266 Pa (2 Torr) |
| Max gas flow N₂ * (water cooled only) | 3000 sccm (5.07 Pam3s⁻¹) |
| Max gas flow Ar * (water cooled only) | 1400 sccm (2.36 Pam3s⁻¹) |
| Rated speed | 27000 rpm |
| Run-up time to 90% rated speed | <8 minutes |
| Mounting position | Any orientation |
| Input voltage | 200-240 V |
| Max input power (without TMS) | 1200 VA |
| Weight | 62 kg |
| * The maximum gas flow is applicable under conditions that N2 or Ar gas is pumped continuously with water cooling temperature between 15-25 °C and the backing pump (10,000 l/min size) is used. It is changed on condition. | |
| Model. | STP-iXA3306C | |
| Inlet flange size | ISO250F / VG250 / ICF305 | ISO320F / VG300 / ICF356 |
| Backing port size | KF40 | K40 |
| Pumping speed N₂ | 2650 ls⁻¹ | 3200 ls⁻¹ |
| Pumping speed Ar | 2300 ls⁻¹ | 2800 ls⁻¹ |
| Weight | 80 kg | 83 kg |
| Compression ratio N₂/H₂ | >10⁸ / 2 x 10³ | |
| Ultimate pressure | 10⁻⁷ Pa (10⁻⁹ Torr) | |
| Allowable backing pressure | 266 Pa (2 Torr) | |
| Max gas flow N₂ *(water cooled only) | 4000 sccm (6.76 Pam3s⁻¹) | |
| Max gas flow Ar * (water cooled only) | 2100 sccm (3.55 Pam3s⁻¹) | |
| Rated speed | 27700 rpm | |
| Starting time | <10 minutes | |
| Mounting position | Any orientation | |
| Input voltage | 200-240 V | |
| Max input power without TMS | 1500 VA | |
| Max input power with TMS | 1800 VA | |
| * The maximum gas flow is applicable under conditions that N2 or Ar gas is pumped continuously with water cooling temperature under 25º C and the backing pump (10,000 l/min size) is used. It is changed on condition. | ||
| Model. | STP-iXA4506 | |
| Outlet port flange | KF40 | |
| Pumping Speed N₂/H₂ VG300 | Litres/second | 3800/2700 |
| Pumping Speed N₂/H₂ ISO320F | Litres/second | 4000/2700 |
| Pumping Speed N₂/H₂ VG350 | Litres/second | 4300/2700 |
| Pumping Speed N₂/H₂ VG400 | Litres/second | 4300/2700 |
| Compression ratio N₂/H₂ | >10⁸ / 10³ | |
| Ultimate pressure | Pa (Torr) | 10⁻⁷(10⁻⁹) |
| Allowable backing pressure | Pa (Torr) | 266(2) |
| Max gas flow N₂ *1 | 4300 | |
| (water cooled only) | (Pa m³/sec) | 7.26 |
| Max gas flow Ar *1 | 2600 | |
| (water cooled only) | (Pa m³/sec) | 4.39 |
| Rated Speed | rpm | 24,240 |
| Starting time | minutes | 11 |
| Mounting position | Any orientation | |
| Input voltage | V | 200-240 |
| Maximum input power without TMS | VA | 1700 |
| Maximum input power with TMS | VA | 2200 |
| Maximum input power VG300 | 109 | |
| Maximum input power ISO320F | 111 | |
| Maximum input power VG350 | 104 | |
| Maximum input power VG400 | 111 | |
