Vacuum pump EDWARDS GX Dry Pumps
The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
Vacuum pump EDWARDS GX Dry Pumps
The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Technology
- Lower Utilities Costs
- Typically a 40% saving can be made on utilities costs over an entire fab.
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Based on a 300mm fab in the US, containing 200 tools, 537 pumps
70% GX pumps, 30% iH pumps - GX fitted with constant flow water valve
- Designed for Energy Efficiency
- High performance motors and inverter drives
- Low operating power consumption
- Lower power standby mode using Active Utility Control (AUC)
- Nitrogen dilution can be tuned to the application requirement
- Minimizes gas usage
- Highly efficient cooling
- High conductivity materials and good design enables low water flow
- Precision ceramic bearings
- Very high load capability for reliability
- Low noise and vibration
- Ethernet Connectivity
- The GX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as:
- Operating status
- Key parameters
- Parameter setpoints
- Alert summary
Applications
- Load Lock
- Transfer
- Metrology
- Lithography
- PVD Process
- PVD Pre-clean
- RTA
- Strip/Ashing
- Oxide Etch
- Metal Etch
- Implant Source
Features and Benefits
- Reduced Cost of Ownership
- Up to a 50% reduction in utilities cost compared to iL/iH drypumps
- No preventative maintenance
- Flexible Installation Options
- Small and light for easy installation
- On-tool, close proximity, or remote
- Possible Tool Throughput Improvements
- One of the fastest loadlock pumps available
- Consistent Pumping Performance Globally
- Pumping speed identical at 50 and 60 Hz
- Reduced Ambient Noise
- Only 55 dB(A)
- Wide Range of Peak Speed 100, 300, 600 and 800 m³h⁻¹
SPECIFICATIONS
| MODEL | GX100L& GX100N& GX100TI | GX600L& GX600N | GX1000N |
| Peak speed | 105 m³h⁻¹ | 620 m³h⁻¹ | 800 m³h⁻¹ |
| 62 ft³min⁻¹ | 365 ft³min⁻¹ | 471 ft³min⁻¹ | |
| 1750 lmin⁻¹ | 10333 lmin⁻¹ | 13333 lmin⁻¹ | |
| Ultimate pressure | 5 x 10⁻³ mbar | 7 x 10 -4 mbar | 1 x 10⁻³ mbar |
| 3.75 x 10⁻³ Torr | 5.25 x 10⁻⁴ Torr | 7.5 x 10⁻⁴ Torr | |
| 0.5 Pa | 0.07 Pa | 0.10 Pa | |
| Ultimate | 1 kW | 1.6 kW | 1.6 kW |
| AUC (Active Utility Controller) | 0.05 kW | 0.05 kW | 1.05 kW |
| Water inlet | 1 slm | 2 slm | 2 slm |
| Nitrogen | 0 slm | 0 slm | 4 or 14 slm ** |
| Footprint (excluding exhaust) | 0.20 m² | 0.20 m² | 0.20 m² |
| Weight | 120 kg | 220 kg | 230 kg |
| Inlet connection | ISO 63 | ISO 100 | ISO 100 |
| Outlet connection | NW25 | NW25 | NW25 |
| Noise at ultimate | <55 dB(A) | <55 dB(A) | <55 dB(A) |
