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  • 产品名称：EPX500 干式真空泵

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  • 产品厂商：半导体干泵
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Vacuum pump EDWARDS EPX500 Dry pump

The EPX series uses a unique, patented, single-shaft regenerative/Holweck® stage mechanism that makes them capable of pumping from atmosphere to ultimate pressures of < 1×10⁻⁴ mbar or < 1×10⁻⁶ mbar depending on model. They are ideal for applications where a better base pressure is required than can be delivered by a typical primary pump and where otherwise a turbomolecular pump and primary pump would be required and also for applications that cycle frequently from atmosphere to low pressures as they can operate continuously at all inlet pressures.

หมวดหมู่: EPX on-tool High Vacuum Pumps, Semiconductor Dry Pumps

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Vacuum pump EDWARDS EPX500 Dry pump

 

Technology

The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated.

 

The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must be provided commensurate with environmental conditions (humidity and temperature) such that the dewpoint is not reached.

 

The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again.

 

The EPX NE series of pumps can be manually operated using the End User Control (EUC) local display and keypad, or remotely using a Pump Display Terminal (PDT), if fitted; it can also be controlled and monitored over the network, which connects to the EPX pump through the Network connector. When the EPX LE series of pumps is controlled via the Tool Interface Module (TIM), the EUC simply monitors the status of the pump.

 

The EPX pump is compatible with Fabworks 32.

The EPX pump is supported by four vibration isolators.

Pump protection sensors automatically shut down the pump if a fault condition arises.

 

Applications

  • Load Lock
  • Transfer Chamber
  • PVD sputtering
  • Ashing/PR Strip
  • Dieletric Etch
  • The EPX series covers a broad range of applications from wafer handling through to medium duty processes.
  • The EPX ‘N’ Series include a gas module that provides Nitrogen purge extending the application range to medium processes in which low levels of corrosive vapours and particulates are expected.

 

Features and Benefits

  • Compact footprint – the EPX is more compact than the equivalent turbomolecular pump and primary pump combination.
  • Low cost of ownership – zero routine maintenance with a 5 year service interval.
  • Unique patent protected pumping mechanism – the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. No separate “rough pumping” required.
  • Ultra clean mechanism – EPX pumps have no grease or oil under vacuum and present no other source of potential contamination.
  • Extremely reliable – based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.
  • Water cooled – low environmental heat load
  • Low noise and vibration – better working environment. Ideal for vibration sensitive environments.

 

SPECIFICATIONS

Model. EPX500L EPX500LE EPX500N EPX500NE
Peak speed 500 m³h⁻¹ 500 m³h⁻¹ 500 m³h⁻¹ 500 m³h⁻¹
295 ft³min⁻¹ 295 ft³min⁻¹ 295 ft³min⁻¹ 295 ft³min⁻¹
8338 lmin⁻¹ 8338 lmin⁻¹ 8338 lmin⁻¹ 8338 lmin⁻¹
Ultimate vacuum <1 x 10⁻⁶ mbar <1 x 10⁻⁶ mbar <1 x 10⁻⁶ mbar <1 x 10⁻⁶ mbar
<7 x 10⁻⁷ Torr <7 x 10⁻⁷ Torr <7 x 10⁻⁷ Torr <7 x 10⁻⁷ Torr
<1 x 10⁻⁴ Pa <1 x 10⁻⁴ Pa <1 x 10⁻⁴ Pa <1 x 10⁻⁴ Pa
Warm-up time (to nominal performance) 30 min 30 min 30 min 30 min
Inlet flange ISO160 ISO160 ISO160 ISO160
Outlet flange NW25 NW25 NW25 NW25
Noise <59 dB(A) <59 dB(A) <59 dB(A) <59 dB(A)
Minimum cooling water flow rate 2 lmin⁻¹ 2 lmin⁻¹ 2 lmin⁻¹ 2 lmin⁻¹
Cooling water temperature 15 – 35 °C 15 – 35 °C 15 – 35 °C 15 – 35 °C
Nitrogen supply interface 1/4 in (6.5 mm) tube 1/4 in (6.5 mm) tube
Nitrogen supply pressure 3 x 105⁻⁷ x 105 pa 3 x 105⁻⁷ x 105 pa
Minimum nitrogen purity 99.95% 99.95%
Electrical Supply 200/208 V, 50/60 Hz 3 phase 200/208 V, 50/60 Hz 3 phase 200/208 V, 50/60 Hz 3 phase 200/208 V, 50/60 Hz 3 phase
Power at ultimate 1.4 kW 1.4 kW 1.4 kW 1.4 kW
Rated motor power 3.0 kW 3.0 kW 3.0 kW 3.0 kW
TIM C3 None C3 None
Weight 45.2 kg 45.2 kg 45.2 kg 45.2 kg

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