Vacuum pump EDWARDS iGX Dry Pumps
The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Technology
- Lower Utilities Costs
- Typically a 40% saving can be made on utilities costs over an entire fab.
-
Based on a 300mm fab in the US, containing 200 tools, 537 pumps
70% iGX pumps, 30% iH pumps
iGX fitted with constant flow water valve - Designed for Energy Efficiency
- High performance motors and inverter drives
- Low operating power consumption
- Lower power standby mode using Active Utility Control (AUC)
- Nitrogen dilution can be tuned to the application requirement
- Minimizes gas usage
- Highly efficient cooling
- High conductivity materials and good design enables low water flow
- Precision ceramic bearings
- Very high load capability for reliability
- Low noise and vibration
- Ethernet Connectivity
- The iGX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as:
- Operating status
- Key parameters
- Parameter setpoints
- Alert summary
Applications iGX100L& iGX600L
- Load Lock
- Transfer
- Metrology
Applications iGX100N & iGX100M & iGX100MTI & iGX600N & iGX600M
- Load Lock
- Transfer
- Metrology
- Lithography
- PVD Process
- PVD Pre-Clean
- RTA
- Strip/Ashing
- Oxide Etch
- Silicon Etch
- Metal Etch
- Implant Source
Features and Benefits
-
Reduced Cost of Ownership
Up to a 50% reduction in utilities cost compared to iL/iH drypumps - No preventative maintenance
- Flexible Installation Options
- Small and light for easy installation
- On-tool, close proximity, or remote
- Possible Tool Throughput Improvements
- One of the fastest load lock pumps available
- Consistent Pumping Performance Globally
- Pumping speed identical at 50 and 60 Hz
- Reduced Ambient Noise
- Only 55 dB(A)
-
Wide Range of Peak Speed
100, 300, 600 and 800 m3h-1
SPECIFICATIONS
| Model. | iGX100L | iGX600L | iGX100N & iGX100M & iGX100MTI | iGX600N & iGX600M |
| Peak speed | 105 m³h⁻¹ | 620 m³h⁻¹ | 105 m³h⁻¹ | 620 m³h⁻¹ |
| 62 cfm | 365 cfm | 62 cfm | 365 cfm | |
| 1750 l min⁻¹ | 10333 l min⁻¹ | 1750 l min⁻¹ | 10333 l min⁻¹ | |
| Ultimate pressure | 5.00E-03 mbar | 7.00E-04 mbar | 5.00E-03 mbar | 7.00E-04 mbar |
| 3.75E-03 Torr | 5.25E-04 Torr | 3.75E-03 Torr | 5.25E-04 Torr | |
| 0.50 Pa | 0.07 Pa | 0.50 Pa | 0.07 Pa | |
| Ultimate | 1 kW | 1.6 kW | 1 kW | 1.6 kW |
| AUC (Active Utility Controller) | 0.05 kW | 0.05 kW | 0.05 kW | 0.05 kW |
| Water inlet* | 1 slm | 2 slm | 1 slm | 2 slm |
| Nitrogen | 0 slm | 0 slm | 4 or 14 slm | 4 or 14 slm |
| Footprint excluding exhaust | 0.20 m² | 0.20 m² | 0.20 m² | 0.20 m² |
| Weight | 120 kg | 220 kg | 120 kg | 220 kg |
| Inlet connection | ISO63 | ISO100 | ISO63 | ISO100 |
| Outlet connection | NW25 | NW25 | NW25 | NW25 |
| Noise at ultimate | < 55 dB(A) | < 55 dB(A) | < 55 dB(A) | < 55 dB(A) |
